{"id":15163,"date":"2021-04-12T23:26:10","date_gmt":"2021-04-12T15:26:10","guid":{"rendered":"https:\/\/www.jxdlz.cn\/?p=15163"},"modified":"2021-04-16T00:49:44","modified_gmt":"2021-04-15T16:49:44","slug":"%e7%ad%89%e7%a6%bb%e5%ad%90%e4%bd%93%e5%a2%9e%e5%bc%ba%e5%8c%96%e5%ad%a6%e6%b0%94%e7%9b%b8%e6%b2%89%e7%a7%afpecvd%e6%8a%80%e6%9c%af%e5%9f%ba%e7%a1%80","status":"publish","type":"post","link":"https:\/\/jxdlz.cn\/?p=15163","title":{"rendered":"\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef(PECVD)\u6280\u672f\u57fa\u7840"},"content":{"rendered":"\n

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\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08PECVD<\/strong>\uff09\u6280\u672f\u662f\u501f\u52a9\u4e8e\u8f89\u5149\u653e\u7535\u7b49\u79bb\u5b50\u4f53\u4f7f\u542b\u6709\u8584\u819c\u7ec4\u6210\u7684\u6c14\u6001\u7269\u8d28\u53d1\u751f\u5316\u5b66\u53cd\u5e94\uff0c\u4ece\u800c\u5b9e\u73b0\u8584\u819c\u6750\u6599\u751f\u957f\u7684\u4e00\u79cd\u65b0\u7684\u5236\u5907\u6280\u672f\u3002\u7531\u4e8ePECVD\u6280\u672f<\/em>\u662f\u901a\u8fc7\u5e94\u6c14\u4f53\u653e\u7535\u6765\u5236\u5907\u8584\u819c\u7684\uff0c\u6709\u6548\u5730\u5229\u7528\u4e86\u975e\u5e73\u8861\u7b49\u79bb\u5b50\u4f53\u7684\u53cd\u5e94\u7279\u5f81\uff0c\u4ece\u6839\u672c\u4e0a\u6539\u53d8\u4e86\u53cd\u5e94\u4f53\u7cfb\u7684\u80fd\u91cf\u4f9b\u7ed9\u65b9\u5f0f\u3002\u4e00\u822c\u8bf4\u6765,\u91c7\u7528PECVD<\/em>\u6280\u672f\u5236\u5907\u8584\u819c\u6750\u6599\u65f6\uff0c\u8584\u819c\u7684\u751f\u957f\u4e3b\u8981\u5305\u542b\u4ee5\u4e0b\u4e09\u4e2a\u57fa\u672c\u8fc7\u7a0b\uff1a<\/p>\n\n\n\n

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2\u3001\u7b49\u79bb\u5b50\u4f53\u5185\u7684\u5316\u5b66\u53cd\u5e94<\/strong><\/p>\n\n\n\n

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\u5728\u8f89\u5149\u653e\u7535\u6761\u4ef6\u4e0b\uff0c\u7531\u4e8e\u7845\u70f7\u7b49\u79bb\u5b50\u4f53\u4e2d\u7684\u7535\u5b50\u5177\u6709\u51e0\u4e2aev \u4ee5\u4e0a\u7684\u80fd\u91cf\uff0c\u56e0\u6b64H2\u548cSiH4\u53d7\u7535\u5b50\u7684\u78b0\u649e\u4f1a\u53d1\u751f\u5206\u89e3\uff0c\u6b64\u7c7b\u53cd\u5e94\u5c5e\u4e8e\u521d\u7ea7\u53cd\u5e94\u3002\u82e5\u4e0d\u8003\u8651\u5206\u89e3\u65f6\u7684\u4e2d\u95f4\u6fc0\u53d1\u6001\uff0c\u53ef\u4ee5\u5f97\u5230\u5982\u4e0b\u4e00\u4e9b\u751f\u6210SiHm\uff08m=0,1,2,3\uff09\u4e0e\u539f\u5b50H \u7684\u79bb\u89e3\u53cd\u5e94\uff1a<\/p>\n\n\n\n

e+SiH4\u2192SiH2+H2+e (2.1)<\/p>\n\n\n\n

e+SiH4\u2192SiH3+ H+e (2.2)<\/p>\n\n\n\n

e+SiH4\u2192Si+2H2+e (2.3)<\/p>\n\n\n\n

e+SiH4\u2192SiH+H2+H+e (2.4)<\/p>\n\n\n\n

e+H2\u21922H+e (2.5)<\/p>\n\n\n\n

\u6309\u7167\u57fa\u6001\u5206\u5b50\u7684\u6807\u51c6\u751f\u4ea7\u70ed\u8ba1\u7b97\uff0c\u4e0a\u8ff0\u5404\u79bb\u89e3\u8fc7\u7a0b(2.1)~(2.5)\u6240\u9700\u7684\u80fd\u91cf\u4f9d\u6b21\u4e3a2.1\u30014.1\u30014.4\u30015.9 eV \u548c4.5eV\u3002\u7b49\u79bb\u5b50\u4f53\u5185\u7684\u9ad8\u80fd\u91cf\u7535\u5b50\u8fd8\u80fd\u591f\u53d1\u751f\u5982\u4e0b\u7684\u7535\u79bb\u53cd\u5e94\uff1a<\/p>\n\n\n\n

e+SiH4\u2192SiH2++H2+2e (2.6)<\/p>\n\n\n\n

e+SiH4\u2192SiH3++ H+2e (2.7)<\/p>\n\n\n\n

e+SiH4\u2192Si++2H2+2e (2.8)<\/p>\n\n\n\n

e+SiH4\u2192SiH++H2+H+2e (2.9)<\/p>\n\n\n\n

\u4ee5\u4e0a\u5404\u7535\u79bb\u53cd\u5e94(2.6)~(2.9)\u9700\u8981\u7684\u80fd\u91cf\u5206\u522b\u4e3a11.9\uff0c12.3\uff0c13.6\u548c15.3eV\uff0c\u7531\u4e8e\u53cd\u5e94\u80fd\u91cf\u7684\u5dee\u5f02\uff0c\u56e0\u6b64(2.1)~(2.9)\u5404\u53cd\u5e94\u53d1\u751f\u7684\u51e0\u7387\u662f\u6781\u4e0d\u5747\u5300\u7684\u3002\u6b64\u5916\uff0c\u968f\u53cd\u5e94\u8fc7\u7a0b(2.1)~(2.5)\u751f\u6210\u7684SiHm\u4e5f\u4f1a\u53d1\u751f\u4e0b\u5217\u7684\u6b21\u7ea7\u53cd\u5e94\u800c\u7535\u79bb\uff0c\u4f8b\u5982<\/p>\n\n\n\n

SiH+e\u2192SiH++2e (2.10)<\/p>\n\n\n\n

SiH2+e\u2192SiH2++2e (2.11)<\/p>\n\n\n\n

SiH3+e\u2192SiH3++2e (2.12)<\/p>\n\n\n\n

\u4e0a\u8ff0\u53cd\u5e94\u5982\u679c\u501f\u52a9\u4e8e\u5355\u7535\u5b50\u8fc7\u7a0b\u8fdb\u884c\uff0c\u5927\u7ea6\u9700\u898112eV \u4ee5\u4e0a\u7684\u80fd\u91cf\u3002\u9274\u4e8e\u901a\u5e38\u5236\u5907\u7845\u57fa\u8584\u819c\u7684\u6c14\u538b\u6761\u4ef6\u4e0b\uff0810\uff5e100Pa\uff09,\u7535\u5b50\u5bc6\u5ea6\u7ea6\u4e3a1010cm-3\u7684\u5f31\u7535\u79bb\u7b49\u79bb\u5b50\u4f53\u4e2d10eV \u4ee5\u4e0a\u7684\u9ad8\u80fd\u7535\u5b50\u6570\u76ee\u8f83\u5c11,\u7d2f\u79ef\u7535\u79bb\u7684\u51e0\u7387\u4e00\u822c\u4e5f\u6bd4\u6fc0\u53d1\u51e0\u7387\u5c0f\uff0c\u56e0\u6b64\u7845\u70f7\u7b49\u79bb\u5b50\u4f53\u4e2d\uff0c\u4e0a\u8ff0\u79bb\u5316\u7269\u7684\u6bd4\u4f8b\u5f88\u5c0f\uff0cSiHm \u7684\u4e2d\u6027\u57fa\u56e2\u5360\u652f\u914d\u5730\u4f4d\uff0c\u8d28\u8c31\u5206\u6790\u7684\u7ed3\u679c\u4e5f\u8bc1\u660e\u4e86\u8fd9\u4e00\u7ed3\u8bba[8]\u3002Bourquard \u7b49\u4eba\u7684\u5b9e\u9a8c\u7ed3\u679c\u8fdb\u4e00\u6b65\u6307\u51fa\uff0cSiHm \u7684\u6d53\u5ea6\u6309\u7167SiH3\uff0cSiH2\uff0cSi\uff0cSiH \u7684\u987a\u5e8f\u9012\u51cf\uff0c\u4f46SiH3\u7684\u6d53\u5ea6\u6700\u591a\u662fSiH \u76843 \u500d\u3002\u800cRobertson \u7b49\u4eba\u5219\u62a5\u9053\uff0c\u5728SiHm\u7684\u4e2d\u6027\u4ea7\u7269\u4e2d\uff0c\u91c7\u7528\u7eaf\u7845\u70f7\u8fdb\u884c\u5927\u529f\u7387\u653e\u7535\u65f6\u4ee5Si\u4e3a\u4e3b\uff0c\u8fdb\u884c\u5c0f\u529f\u7387\u653e\u7535\u65f6\u4ee5SiH3\u4e3a\u4e3b\uff0c\u6309\u6d53\u5ea6\u7531\u9ad8\u5230\u4f4e\u7684\u987a\u5e8f\u4e3aSiH3\uff0cSiH\uff0cSi\uff0cSiH2\u3002\u56e0\u6b64\uff0c\u7b49\u79bb\u5b50\u4f53\u5de5\u827a\u53c2\u6570\u5f3a\u70c8\u5f71\u54cdSiHm\u4e2d\u6027\u4ea7\u7269\u7684\u7ec4\u5206\u3002<\/p>\n\n\n\n

\u9664\u4e0a\u8ff0\u7684\u79bb\u89e3\u53cd\u5e94\u548c\u7535\u79bb\u53cd\u5e94\u4e4b\u5916\uff0c\u79bb\u5b50\u5206\u5b50\u4e4b\u95f4\u7684\u6b21\u7ea7\u53cd\u5e94\u4e5f\u5f88\u91cd\u8981\uff1a<\/p>\n\n\n\n

SiH2\uff0b+SiH4\u2192SiH3++SiH3 (2.13)<\/p>\n\n\n\n

\u56e0\u6b64\uff0c\u5c31\u79bb\u5b50\u6d53\u5ea6\u800c\u8a00\uff0cSiH3+\u6bd4SiH2+\u591a\u3002\u5b83\u53ef\u4ee5\u8bf4\u660e\u5728\u901a\u5e38\u7684SiH4 \u7b49\u79bb\u5b50\u4f53\u4e2dSiH3+\u79bb\u5b50\u6bd4SiH2+\u79bb\u5b50\u591a\u7684\u539f\u56e0\u3002<\/p>\n\n\n\n

\u6b64\u5916\uff0c\u8fd8\u4f1a\u53d1\u751f\u7531\u7b49\u79bb\u5b50\u4f53\u4e2d\u6c22\u539f\u5b50\u593a\u53d6SiH4\u4e2d\u6c22\u7684\u5206\u5b50-\u539f\u5b50\u78b0\u649e\u53cd\u5e94\uff1a<\/p>\n\n\n\n

H+ SiH4\u2192SiH3+H2 (2.14)<\/p>\n\n\n\n

\u8fd9\u662f\u4e00\u4e2a\u653e\u70ed\u53cd\u5e94\uff0c\u4e5f\u662f\u5f62\u6210\u4e59\u7845\u70f7Si2H6\u7684\u524d\u9a71\u53cd\u3002\u5f53\u7136\u4e0a\u8ff0\u57fa\u56e2\u4e0d\u4ec5\u4ec5\u5904\u4e8e\u57fa\u6001\uff0c\u5728\u7b49\u79bb\u5b50\u4f53\u4e2d\u8fd8\u4f1a\u88ab\u6fc0\u52b1\u5230\u6fc0\u53d1\u6001\u3002\u5bf9\u7845\u70f7\u7b49\u79bb\u5b50\u4f53\u7684\u53d1\u5c04\u5149\u8c31\u7814\u7a76\u7684\u7ed3\u679c\u8868\u660e\uff0c\u5b58\u5728\u6709Si,SiH,H \u7b49\u7684\u5149\u5b66\u5141\u8bb8\u8dc3\u8fc1\u6fc0\u53d1\u6001,\u4e5f\u5b58\u5728SiH2,SiH3\u7684\u632f\u52a8\u6fc0\u53d1\u6001\u3002<\/p>\n\n\n\n

<\/p>\n\n\n\n

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