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System\uff09\uff0c\u5c5e\u4e8e\u4e0a\u9762\u63d0\u5230\u7684\u79bb\u5b50\u675f\u589e\u5f3a\u4e8c\u6781\u6e85\u5c04\u6a21\u5f0f\u3002\u5176\u7279\u70b9\u662f\uff1a\u9ad8\u6210\u819c\u901f\u7387\u3001\u9ad8\u9776\u6750\u5229\u7528\u7387\uff08&gt;95%\uff09\u3001\u819c\u5c42\u8d28\u91cf\u4f18\u826f\u3002\u5728\u5149\u4f0f\u5668\u4ef6\u3001\u5149\u7535\u8584\u819c\u3001\u534a\u5bfc\u4f53\u8584\u819c\u3001\u78c1\u8bb0\u5f55\u8584\u819c\u3001\u7cbe\u5bc6\u5149\u5b66\u8584\u819c\u548c\u5de5\u7a0b\u6d82\u5c42\u65b9\u9762\u5f97\u5230\u5e7f\u6cdb\u5e94\u7528\u3002<br><br>\u63d0\u9ad8\u6e85\u5c04\u901f\u7387\u662f\u6709\u4e00\u5b9a\u9650\u5ea6\u7684\u3002\u65bd\u52a0\u5230\u9776\u8868\u9762\u7684\u529f\u7387\u5bc6\u5ea6\u4e0e\u9776\u7684\u6e85\u5c04\u901f\u7387\u6210\u6b63\u6bd4\u3002\u7b49\u79bb\u5b50\u4f53\u653e\u7535\u7a7a\u95f4\u7684\u79bb\u5316\u7387\u8d8a\u9ad8\uff0c\u9776\u7684\u6e85\u5c04\u7535\u6d41\u624d\u53ef\u80fd\u589e\u5927\u3002\u4e8e\u662f\u6709\u4e86\u79cd\u79cd\u5f3a\u5316\u7535\u79bb\u7684\u624b\u6bb5\u6765\u63d0\u9ad8\u6e85\u5c04\u901f\u7387\u3002\u5b9e\u9645\u4e0a\u9650\u5236\u6e85\u5c04\u901f\u7387\u7684\u539f\u56e0\u662f\uff1a\u9776\uff08\u9634\u6781\uff09\u80fd\u591f\u8017\u6563\u591a\u5c11\u529f\u7387\uff1f\u6e85\u5c04\u79bb\u5b50\u7684\u80fd\u91cf\u5927\u7ea670%\u9700\u8981\u4ece\u9634\u6781\u51b7\u5374\u6c34\u4e2d\u5e26\u8d70\uff0c\u5982\u679c\u8fd9\u4e9b\u70ed\u91cf\u4e0d\u80fd\u53ca\u65f6\u5e26\u8d70\uff0c\u9776\u6750\u8868\u9762\u5c06\u6025\u5267\u5347\u6e29\u3001\u7194\u5316\u3001\u84b8\u53d1\uff08\u5347\u534e\uff09\u2026\u4ece\u800c\u8131\u79bb\u6e85\u5c04\u7684\u57fa\u672c\u6a21\u5f0f\u3002<br>l<br>J.Musil\u7814\u7a76\u4e86\u9ad8\u901f\u7387\u6e85\u5c04\u548c\u81ea\u6e85\u5c04\uff0c\u65bd\u52a0\u7684\u9776\u529f\u7387\u5bc6\u5ea6\u9ad8\u8fbe50W\/cm2,\u751a\u81f3\u66f4\u9ad8\uff0c\u4f46\u662f\uff1a\u53ea\u6709Cu,Ag,Au\u9776\u5448\u73b0\u81ea\u6e85\u5c04\u6548\u5e94\u3002\u5728\u5b9e\u9a8c\u5ba4\u7279\u6b8a\u6761\u4ef6\u4e0b\u5448\u73b0\u9ad8\u901f\u7387\u6e85\u5c04\u6548\u679c\uff0c\u5728\u5de5\u4e1a\u5316\u5e94\u7528\u4e0a\u5f88\u96be\u5b9e\u73b0\u3002\u53cd\u8fc7\u6765\u8bc1\u660e\uff1a\u5de5\u4e1a\u5316\u5e94\u7528\u4e2d\u9002\u5408\u7684\u529f\u7387\u5bc6\u5ea6\u5e94\u8be5\u572830W\/cm2\u4ee5\u4e0b\u3002<\/p>\n\n\n\n<p>\u4e3a\u4e86\u4fdd\u8bc1\u5de5\u4e1a\u5316\u5e94\u7528\u4e2d\u9776\u7684\u7a33\u5b9a\u8fd0\u884c\uff0c\u76f4\u63a5\u6c34\u51b7\u800c\u4e14\u9776\u6750\u5bfc\u70ed\u6027\u80fd\u826f\u597d\u7684\u60c5\u51b5\u4e0b\u6240\u65bd\u52a0\u7684\u529f\u7387\u5bc6\u5ea6\u5e94\u8be5\u572825W\/cm2\u4ee5\u4e0b\u3002\u95f4\u63a5\u6c34\u51b7\u800c\u4e14\u9776\u6750\u5bfc\u70ed\u6027\u80fd\u826f\u597d\u7684\u60c5\u51b5\u4e0b\u6240\u65bd\u52a0\u7684\u529f\u7387\u5bc6\u5ea6\u5e94\u8be5\u572815-20W\/cm2\u4ee5\u4e0b\u3002<br>l \u5982\u679c\u9776\u6750\u5bfc\u70ed\u6027\u80fd\u5dee\u3001\u9776\u6750\u7531\u4e8e\u70ed\u5e94\u529b\u800c\u5f15\u8d77\u788e\u88c2\u3001\u9776\u6750\u542b\u6709\u4f4e\u6325\u53d1\u6027\u7684\u5408\u91d1\u7ec4\u5206\u7b49\u60c5\u51b5\u65bd\u52a0\u529f\u7387\u53ea\u80fd\u57282-10W\/cm2\u4ee5\u4e0b\u3002<br>l \u9776\u529f\u7387\u7684\u8017\u6563\u80fd\u529b\u8981\u6c42\u7cbe\u5fc3\u8bbe\u8ba1\u9776\uff08\u9634\u6781\uff09\u7684\u5404\u4e2a\u4f20\u70ed\u548c\u6563\u70ed\u73af\u8282\uff1a\u9776\u6750\u7684\u70ed\u6027\u80fd\u3001\u9776\u6750\u4e0e\u51b7\u5957\u7684\u70ed\u63a5\u89e6\u5c42\u3001\u51b7\u5374\u4ecb\u8d28\u7684\u70ed\u6027\u80fd\u3001\u51b7\u5374\u4ecb\u8d28\u4e0e\u51b7\u5957\u7684\u63a5\u89e6\u9762\u79ef\u3001\u51b7\u5374\u4ecb\u8d28\u7684\u6d41\u901f\uff08\u538b\u529b\uff09\uff0c\u51b7\u5374\u4ecb\u8d28\u7684\u540e\u7eed\u6362\u70ed\u529f\u80fd\u548c\u6052\u6e29\u529f\u80fd\u3002<br>4.<br>\u78c1\u63a7\u6e85\u5c04\u7684\u9776\u6750\u5229\u7528\u7387\u95ee\u9898\u3002\u4e00\u822c\u78c1\u63a7\u9776\u7684\u9776\u6750\u5229\u7528\u7387\u5c0f\u4e8e20%\uff0c\u7ecf\u8fc7\u7279\u6b8a\u5904\u7406\u78c1\u573a\u7684\u78c1\u63a7\u6e85\u5c04\u9776\u7684\u9776\u6750\u5229\u7528\u7387\u53ef\u4ee5\u8fbe\u523040-50%\u5de6\u53f3\u3002\u8981\u60f3\u4f7f\u9776\u6750\u5229\u7528\u7387\u8fdb\u4e00\u6b65\u63d0\u9ad8\uff0c\u53ea\u6709\u91c7\u53d6\u5782\u76f4\u79fb\u52a8\u78c1\u573a\u7684\u8bbe\u8ba1\u65b9\u6848\uff0c\u5373\u4f7f\u5982\u6b64\uff0c\u9776\u6750\u5229\u7528\u7387\u63d0\u9ad8\u523075%\u4ee5\u4e0a\u4ecd\u7136\u662f\u76f8\u5f53\u56f0\u96be\u7684\uff08\u7279\u522b\u5bf9\u4e8e\u77e9\u5f62\u5e73\u9762\u9776\u6765\u8bf4\uff09\u3002\u8f6c\u52a8\u9776\u6750\u7684\u67f1\u72b6\u9776\u867d\u7136\u6709\u8f83\u9ad8\u7684\u9776\u6750\u5229\u7528\u7387\uff08\u5927\u7ea680%\u5de6\u53f3\uff09\uff0c\u8003\u8651\u5230\u8fd0\u884c\u7a33\u5b9a\u6027\u548c\u51b7\u5374\u6548\u7387\uff0c\u5e38\u5e38\u4e5f\u4e0d\u80fd\u5c06\u5176\u7279\u70b9\u53d1\u6325\u5230\u6781\u9650\u3002\u6240\u4ee5\u8bf4\uff1a\u589e\u52a0\u9776\u7ed3\u6784\u7684\u590d\u6742\u7a0b\u5ea6\u6765\u6362\u53d6\u8f83\u9ad8\u7684\u9776\u6750\u5229\u7528\u7387\uff0c\u6709\u4e00\u4e2a\u5f97\u5931\u8bc4\u4f30\u7684\u95ee\u9898\u3002<br>\u8981\u60f3\u4ece\u6839\u672c\u4e0a\u89e3\u51b3\u9776\u6750\u5229\u7528\u7387\u95ee\u9898\uff0c\u53ef\u80fd\u8fd8\u662f\u8981\u56de\u5230\u4e8c\u6781\u6e85\u5c04\u6a21\u5f0f\uff0c\u6240\u4ee5\u6700\u8fd1\u63a8\u51fa\u7684\u79bb\u5b50\u675f\u589e\u5f3a\u6e85\u5c04\u5f15\u8d77\u4eba\u4eec\u7684\u5e7f\u6cdb\u91cd\u89c6\u3002<br>5.<br>\u79bb\u5b50\u8f85\u52a9\u6e85\u5c04\u5de5\u827a\u3002\u79bb\u5b50\u8f85\u52a9\u9540\u819c\uff08Ion Assisted 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Plating\uff09\u6280\u672f\u4e0d\u540c\uff0c\u5404\u81ea\u7684\u7269\u7406\u6a21\u578b\u4e0d\u4e00\u6837\uff0c\u4e0d\u80fd\u5c06\u504f\u538b\u6e85\u5c04\u4e0eIAD\u6280\u672f\u6df7\u540c\u8d77\u6765\u3002\u6210\u819c\u8fc7\u7a0b\u4e2d\u4f34\u968f\u9002\u5f53\u80fd\u91cf\u7684\u79bb\u5b50\u8f70\u51fb\u5bf9\u589e\u52a0\u819c\u5c42\u9644\u7740\u529b\u3001\u964d\u4f4e\u819c\u5c42\u5185\u5e94\u529b\u3001\u6539\u5584\u819c\u5c42\u7ed3\u6784\u3001\u4fdd\u8bc1\u819c\u5c42\u7ec4\u5206\u6bd4\u3001\u83b7\u5f97\u5149\u6ed1\u7684\u819c\u5c42\u8868\u9762\u90fd\u6709\u660e\u663e\u7684\u6548\u679c\u3002\u4f46\u662f\u8fd9\u4e2a\u8fc7\u7a0b\u5e94\u8be5\u662f\u53ef\u63a7\u7684\u3002\u8fc7\u5ea6\u7684\u79bb\u5b50\u8f70\u51fb\u53cd\u800c\u4f1a\u5e26\u6765\u76f8\u53cd\u7684\u6548\u679c\uff0c\u4f8b\u5982\uff1a\u6c89\u79ef\u7c92\u5b50\u7684\u518d\u6e85\u5c04\u3001\u6676\u683c\u7f3a\u9677\u6216\u4f4d\u9519\u589e\u52a0\u3001\u5185\u5e94\u529b\u53d8\u5f02\u3001\u7ed3\u6676\u8868\u9762\u7c97\u5316\u3001\u819c\u5c42\u7ec4\u5206\u504f\u79bb\u3001\u90bb\u8fd1\u7ed3\u6784\u5bf9\u57fa\u7247\u8868\u9762\u7684\u6c61\u67d3\u7b49\u3002<br>l 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